2/11/2012	10:50:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2012	10:50:43 AM	Recipe started at 10:50 AM
2/11/2012	10:50:43 AM	Helium valve closed
2/11/2012	10:50:43 AM	H2 valve closed
2/11/2012	10:50:43 AM	BCl3 valve closed
2/11/2012	10:50:43 AM	PH3 valve closed
2/11/2012	10:50:43 AM	SiCl4 pre valve closed
2/11/2012	10:50:43 AM	SiCl4 post valve closed
2/11/2012	10:50:43 AM	Main Vac valve closed
2/11/2012	10:50:43 AM	Bypass valve closed
2/11/2012	10:50:43 AM	Bubbler valve closed
2/11/2012	10:50:43 AM	Helium MFC set to  0.000000
2/11/2012	10:50:43 AM	H2 MFC set to  0.000000
2/11/2012	10:50:43 AM	BCl3 MFC set to  0.000000
2/11/2012	10:50:43 AM	PH3 MFC set to  0.000000
2/11/2012	10:50:43 AM	SiCl4 MFC set to  0.000000
2/11/2012	10:50:43 AM	Bypass solenoid MFC set to  0.000000
2/11/2012	10:50:43 AM	Tube furnace set to 0
2/11/2012	10:50:46 AM	H2 valve closed
2/11/2012	10:50:46 AM	BCl3 valve closed
2/11/2012	10:50:46 AM	PH3 valve closed
2/11/2012	10:50:46 AM	SiCl4 pre valve closed
2/11/2012	10:50:46 AM	SiCl4 post valve closed
2/11/2012	10:50:46 AM	Main Vac valve closed
2/11/2012	10:50:46 AM	Bypass valve closed
2/11/2012	10:50:46 AM	Bubbler valve closed
2/11/2012	10:50:46 AM	Helium valve opened
2/11/2012	10:50:46 AM	Helium MFC set to  500.000000
2/11/2012	10:50:46 AM	H2 MFC set to  0.000000
2/11/2012	10:50:46 AM	BCl3 MFC set to  0.000000
2/11/2012	10:50:46 AM	PH3 MFC set to  0.000000
2/11/2012	10:50:46 AM	SiCl4 MFC set to  0.000000
2/11/2012	10:50:46 AM	Bypass solenoid MFC set to  0.000000
2/11/2012	10:50:46 AM	Tube furnace set to 0
2/11/2012	10:51:51 AM	Helium valve closed
2/11/2012	10:51:51 AM	H2 valve closed
2/11/2012	10:51:51 AM	BCl3 valve closed
2/11/2012	10:51:51 AM	PH3 valve closed
2/11/2012	10:51:51 AM	SiCl4 pre valve closed
2/11/2012	10:51:51 AM	SiCl4 post valve closed
2/11/2012	10:51:51 AM	Main Vac valve closed
2/11/2012	10:51:51 AM	Bypass valve closed
2/11/2012	10:51:51 AM	Bubbler valve closed
2/11/2012	10:51:51 AM	Helium MFC set to  0.000000
2/11/2012	10:51:51 AM	H2 MFC set to  0.000000
2/11/2012	10:51:51 AM	BCl3 MFC set to  0.000000
2/11/2012	10:51:51 AM	PH3 MFC set to  0.000000
2/11/2012	10:51:51 AM	SiCl4 MFC set to  0.000000
2/11/2012	10:51:51 AM	Bypass solenoid MFC set to  0.000000
2/11/2012	10:51:51 AM	Tube furnace set to 0
2/11/2012	10:51:52 AM	Run finished at 10:51 AM
2/11/2012	10:51:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2012	10:56:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2012	10:56:57 AM	Recipe started at 10:56 AM
2/11/2012	10:56:58 AM	Helium valve closed
2/11/2012	10:56:58 AM	H2 valve closed
2/11/2012	10:56:58 AM	BCl3 valve closed
2/11/2012	10:56:58 AM	PH3 valve closed
2/11/2012	10:56:58 AM	SiCl4 pre valve closed
2/11/2012	10:56:58 AM	SiCl4 post valve closed
2/11/2012	10:56:58 AM	Main Vac valve closed
2/11/2012	10:56:58 AM	Bubbler valve closed
2/11/2012	10:56:58 AM	Bypass valve opened
2/11/2012	10:56:58 AM	Helium MFC set to  0.000000
2/11/2012	10:56:58 AM	H2 MFC set to  0.000000
2/11/2012	10:56:58 AM	BCl3 MFC set to  0.000000
2/11/2012	10:56:58 AM	PH3 MFC set to  0.000000
2/11/2012	10:56:58 AM	SiCl4 MFC set to  0.000000
2/11/2012	10:56:58 AM	Bypass solenoid MFC set to  0.000000
2/11/2012	10:56:58 AM	Tube furnace set to 0
2/11/2012	10:58:03 AM	Helium valve closed
2/11/2012	10:58:03 AM	H2 valve closed
2/11/2012	10:58:03 AM	BCl3 valve closed
2/11/2012	10:58:03 AM	PH3 valve closed
2/11/2012	10:58:03 AM	SiCl4 pre valve closed
2/11/2012	10:58:03 AM	SiCl4 post valve closed
2/11/2012	10:58:03 AM	Main Vac valve closed
2/11/2012	10:58:03 AM	Bubbler valve closed
2/11/2012	10:58:03 AM	Bypass valve opened
2/11/2012	10:58:03 AM	Helium MFC set to  0.000000
2/11/2012	10:58:03 AM	H2 MFC set to  0.000000
2/11/2012	10:58:03 AM	BCl3 MFC set to  0.000000
2/11/2012	10:58:03 AM	PH3 MFC set to  0.000000
2/11/2012	10:58:03 AM	SiCl4 MFC set to  0.000000
2/11/2012	10:58:03 AM	Bypass solenoid MFC set to  0.000000
2/11/2012	10:58:03 AM	Tube furnace set to 0
2/11/2012	10:59:03 AM	Helium valve closed
2/11/2012	10:59:03 AM	H2 valve closed
2/11/2012	10:59:03 AM	BCl3 valve closed
2/11/2012	10:59:03 AM	PH3 valve closed
2/11/2012	10:59:03 AM	SiCl4 pre valve closed
2/11/2012	10:59:03 AM	SiCl4 post valve closed
2/11/2012	10:59:03 AM	Bypass valve closed
2/11/2012	10:59:03 AM	Bubbler valve closed
2/11/2012	10:59:03 AM	Main Vac valve opened
2/11/2012	10:59:03 AM	Helium MFC set to  0.000000
2/11/2012	10:59:03 AM	H2 MFC set to  0.000000
2/11/2012	10:59:03 AM	BCl3 MFC set to  0.000000
2/11/2012	10:59:03 AM	PH3 MFC set to  0.000000
2/11/2012	10:59:03 AM	SiCl4 MFC set to  0.000000
2/11/2012	10:59:03 AM	Bypass solenoid MFC set to  0.000000
2/11/2012	10:59:03 AM	Tube furnace set to 0
2/11/2012	10:59:04 AM	Run finished at 10:59 AM
2/11/2012	10:59:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2012	12:29:27 PM	Main Vac valve closed
2/11/2012	12:29:46 PM	Main Vac valve opened
2/11/2012	12:31:01 PM	Recipe started at 12:30 PM
2/11/2012	12:31:01 PM	Helium valve closed
2/11/2012	12:31:01 PM	H2 valve closed
2/11/2012	12:31:01 PM	BCl3 valve closed
2/11/2012	12:31:01 PM	PH3 valve closed
2/11/2012	12:31:01 PM	SiCl4 pre valve closed
2/11/2012	12:31:01 PM	SiCl4 post valve closed
2/11/2012	12:31:01 PM	Main Vac valve closed
2/11/2012	12:31:01 PM	Bypass valve closed
2/11/2012	12:31:01 PM	Bubbler valve closed
2/11/2012	12:31:01 PM	Helium MFC set to  0.000000
2/11/2012	12:31:01 PM	H2 MFC set to  0.000000
2/11/2012	12:31:01 PM	BCl3 MFC set to  0.000000
2/11/2012	12:31:01 PM	PH3 MFC set to  0.000000
2/11/2012	12:31:01 PM	SiCl4 MFC set to  0.000000
2/11/2012	12:31:01 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	12:31:01 PM	Tube furnace set to 0
2/11/2012	12:31:04 PM	Helium valve closed
2/11/2012	12:31:04 PM	BCl3 valve closed
2/11/2012	12:31:04 PM	PH3 valve closed
2/11/2012	12:31:04 PM	SiCl4 pre valve closed
2/11/2012	12:31:04 PM	SiCl4 post valve closed
2/11/2012	12:31:04 PM	Main Vac valve closed
2/11/2012	12:31:04 PM	Bypass valve closed
2/11/2012	12:31:04 PM	Bubbler valve closed
2/11/2012	12:31:04 PM	H2 valve opened
2/11/2012	12:31:04 PM	Helium MFC set to  0.000000
2/11/2012	12:31:04 PM	H2 MFC set to  500.000000
2/11/2012	12:31:04 PM	BCl3 MFC set to  0.000000
2/11/2012	12:31:04 PM	PH3 MFC set to  0.000000
2/11/2012	12:31:04 PM	SiCl4 MFC set to  0.000000
2/11/2012	12:31:04 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	12:31:04 PM	Tube furnace set to 0
2/11/2012	12:32:12 PM	Helium valve closed
2/11/2012	12:32:12 PM	BCl3 valve closed
2/11/2012	12:32:12 PM	PH3 valve closed
2/11/2012	12:32:12 PM	SiCl4 pre valve closed
2/11/2012	12:32:12 PM	SiCl4 post valve closed
2/11/2012	12:32:12 PM	Main Vac valve closed
2/11/2012	12:32:12 PM	Bypass valve closed
2/11/2012	12:32:12 PM	H2 valve opened
2/11/2012	12:32:12 PM	Bubbler valve opened
2/11/2012	12:32:12 PM	Helium MFC set to  0.000000
2/11/2012	12:32:12 PM	H2 MFC set to  500.000000
2/11/2012	12:32:12 PM	BCl3 MFC set to  0.000000
2/11/2012	12:32:12 PM	PH3 MFC set to  0.000000
2/11/2012	12:32:12 PM	SiCl4 MFC set to  0.000000
2/11/2012	12:32:12 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	12:32:12 PM	Tube furnace set to 0
2/11/2012	12:32:13 PM	Helium valve closed
2/11/2012	12:32:13 PM	BCl3 valve closed
2/11/2012	12:32:13 PM	PH3 valve closed
2/11/2012	12:32:13 PM	SiCl4 pre valve closed
2/11/2012	12:32:13 PM	SiCl4 post valve closed
2/11/2012	12:32:13 PM	Main Vac valve closed
2/11/2012	12:32:13 PM	Bypass valve closed
2/11/2012	12:32:13 PM	H2 valve opened
2/11/2012	12:32:13 PM	Bubbler valve opened
2/11/2012	12:32:13 PM	Helium MFC set to  0.000000
2/11/2012	12:32:13 PM	H2 MFC set to  500.000000
2/11/2012	12:32:13 PM	BCl3 MFC set to  0.000000
2/11/2012	12:32:13 PM	PH3 MFC set to  0.000000
2/11/2012	12:32:13 PM	SiCl4 MFC set to  0.000000
2/11/2012	12:32:13 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	12:32:13 PM	Tube furnace set to 1000
2/11/2012	12:57:13 PM	Helium valve closed
2/11/2012	12:57:13 PM	BCl3 valve closed
2/11/2012	12:57:13 PM	PH3 valve closed
2/11/2012	12:57:13 PM	Main Vac valve closed
2/11/2012	12:57:13 PM	Bypass valve closed
2/11/2012	12:57:13 PM	H2 valve opened
2/11/2012	12:57:13 PM	SiCl4 pre valve opened
2/11/2012	12:57:13 PM	SiCl4 post valve opened
2/11/2012	12:57:13 PM	Bubbler valve opened
2/11/2012	12:57:13 PM	Helium MFC set to  0.000000
2/11/2012	12:57:13 PM	H2 MFC set to  450.000000
2/11/2012	12:57:13 PM	BCl3 MFC set to  0.000000
2/11/2012	12:57:13 PM	PH3 MFC set to  0.000000
2/11/2012	12:57:13 PM	SiCl4 MFC set to  50.000000
2/11/2012	12:57:13 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	12:57:13 PM	Tube furnace set to 1000
2/11/2012	1:37:14 PM	Helium valve closed
2/11/2012	1:37:14 PM	BCl3 valve closed
2/11/2012	1:37:14 PM	PH3 valve closed
2/11/2012	1:37:14 PM	SiCl4 pre valve closed
2/11/2012	1:37:14 PM	SiCl4 post valve closed
2/11/2012	1:37:14 PM	Main Vac valve closed
2/11/2012	1:37:14 PM	Bypass valve closed
2/11/2012	1:37:14 PM	H2 valve opened
2/11/2012	1:37:14 PM	Bubbler valve opened
2/11/2012	1:37:14 PM	Helium MFC set to  0.000000
2/11/2012	1:37:14 PM	H2 MFC set to  500.000000
2/11/2012	1:37:14 PM	BCl3 MFC set to  0.000000
2/11/2012	1:37:14 PM	PH3 MFC set to  0.000000
2/11/2012	1:37:14 PM	SiCl4 MFC set to  0.000000
2/11/2012	1:37:14 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	1:37:14 PM	Tube furnace set to 750
2/11/2012	1:52:14 PM	H2 valve closed
2/11/2012	1:52:14 PM	BCl3 valve closed
2/11/2012	1:52:14 PM	PH3 valve closed
2/11/2012	1:52:14 PM	SiCl4 pre valve closed
2/11/2012	1:52:14 PM	SiCl4 post valve closed
2/11/2012	1:52:14 PM	Main Vac valve closed
2/11/2012	1:52:14 PM	Bypass valve closed
2/11/2012	1:52:14 PM	Helium valve opened
2/11/2012	1:52:14 PM	Bubbler valve opened
2/11/2012	1:52:14 PM	Helium MFC set to  500.000000
2/11/2012	1:52:14 PM	H2 MFC set to  0.000000
2/11/2012	1:52:14 PM	BCl3 MFC set to  0.000000
2/11/2012	1:52:14 PM	PH3 MFC set to  0.000000
2/11/2012	1:52:14 PM	SiCl4 MFC set to  0.000000
2/11/2012	1:52:14 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	1:52:14 PM	Tube furnace set to 0
2/11/2012	2:12:14 PM	Helium valve closed
2/11/2012	2:12:14 PM	H2 valve closed
2/11/2012	2:12:14 PM	BCl3 valve closed
2/11/2012	2:12:14 PM	PH3 valve closed
2/11/2012	2:12:14 PM	SiCl4 pre valve closed
2/11/2012	2:12:14 PM	SiCl4 post valve closed
2/11/2012	2:12:14 PM	Main Vac valve closed
2/11/2012	2:12:14 PM	Bypass valve closed
2/11/2012	2:12:14 PM	Bubbler valve closed
2/11/2012	2:12:14 PM	Helium MFC set to  0.000000
2/11/2012	2:12:14 PM	H2 MFC set to  0.000000
2/11/2012	2:12:14 PM	BCl3 MFC set to  0.000000
2/11/2012	2:12:14 PM	PH3 MFC set to  0.000000
2/11/2012	2:12:14 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:12:14 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	2:12:14 PM	Tube furnace set to 0
2/11/2012	2:32:14 PM	Helium valve closed
2/11/2012	2:32:14 PM	H2 valve closed
2/11/2012	2:32:14 PM	BCl3 valve closed
2/11/2012	2:32:14 PM	PH3 valve closed
2/11/2012	2:32:14 PM	SiCl4 pre valve closed
2/11/2012	2:32:14 PM	SiCl4 post valve closed
2/11/2012	2:32:14 PM	Main Vac valve closed
2/11/2012	2:32:14 PM	Bubbler valve closed
2/11/2012	2:32:14 PM	Bypass valve opened
2/11/2012	2:32:14 PM	Helium MFC set to  0.000000
2/11/2012	2:32:14 PM	H2 MFC set to  0.000000
2/11/2012	2:32:14 PM	BCl3 MFC set to  0.000000
2/11/2012	2:32:14 PM	PH3 MFC set to  0.000000
2/11/2012	2:32:14 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:32:14 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	2:32:14 PM	Tube furnace set to 0
2/11/2012	2:33:00 PM	Helium valve closed
2/11/2012	2:33:00 PM	H2 valve closed
2/11/2012	2:33:00 PM	BCl3 valve closed
2/11/2012	2:33:00 PM	PH3 valve closed
2/11/2012	2:33:00 PM	SiCl4 pre valve closed
2/11/2012	2:33:00 PM	SiCl4 post valve closed
2/11/2012	2:33:00 PM	Main Vac valve closed
2/11/2012	2:33:00 PM	Bubbler valve closed
2/11/2012	2:33:00 PM	Bypass valve opened
2/11/2012	2:33:00 PM	Helium MFC set to  0.000000
2/11/2012	2:33:00 PM	H2 MFC set to  0.000000
2/11/2012	2:33:00 PM	BCl3 MFC set to  0.000000
2/11/2012	2:33:00 PM	PH3 MFC set to  0.000000
2/11/2012	2:33:00 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:33:00 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	2:33:00 PM	Tube furnace set to 0
2/11/2012	2:34:00 PM	Helium valve closed
2/11/2012	2:34:00 PM	H2 valve closed
2/11/2012	2:34:00 PM	BCl3 valve closed
2/11/2012	2:34:00 PM	PH3 valve closed
2/11/2012	2:34:00 PM	SiCl4 pre valve closed
2/11/2012	2:34:00 PM	SiCl4 post valve closed
2/11/2012	2:34:00 PM	Bypass valve closed
2/11/2012	2:34:00 PM	Bubbler valve closed
2/11/2012	2:34:00 PM	Main Vac valve opened
2/11/2012	2:34:00 PM	Helium MFC set to  0.000000
2/11/2012	2:34:00 PM	H2 MFC set to  0.000000
2/11/2012	2:34:00 PM	BCl3 MFC set to  0.000000
2/11/2012	2:34:00 PM	PH3 MFC set to  0.000000
2/11/2012	2:34:00 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:34:00 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	2:34:00 PM	Tube furnace set to 0
2/11/2012	2:41:57 PM	Run aborted at 2:41 PM
2/11/2012	2:41:57 PM	Helium valve closed
2/11/2012	2:41:57 PM	H2 valve closed
2/11/2012	2:41:57 PM	BCl3 valve closed
2/11/2012	2:41:57 PM	PH3 valve closed
2/11/2012	2:41:57 PM	SiCl4 pre valve closed
2/11/2012	2:41:57 PM	SiCl4 post valve closed
2/11/2012	2:41:57 PM	Bypass valve closed
2/11/2012	2:41:57 PM	Main Vac valve closed
2/11/2012	2:41:57 PM	Bubbler valve closed
2/11/2012	2:41:57 PM	Helium MFC set to  0.000000
2/11/2012	2:41:57 PM	H2 MFC set to  0.000000
2/11/2012	2:41:57 PM	BCl3 MFC set to  0.000000
2/11/2012	2:41:57 PM	PH3 MFC set to  0.000000
2/11/2012	2:41:57 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:41:57 PM	Tube furnace set to 0
2/11/2012	2:41:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2012	2:42:00 PM	Recipe started at 2:42 PM
2/11/2012	2:42:00 PM	Helium valve closed
2/11/2012	2:42:00 PM	H2 valve closed
2/11/2012	2:42:00 PM	BCl3 valve closed
2/11/2012	2:42:00 PM	PH3 valve closed
2/11/2012	2:42:00 PM	SiCl4 pre valve closed
2/11/2012	2:42:00 PM	SiCl4 post valve closed
2/11/2012	2:42:00 PM	Main Vac valve closed
2/11/2012	2:42:00 PM	Bypass valve closed
2/11/2012	2:42:00 PM	Bubbler valve closed
2/11/2012	2:42:00 PM	Helium MFC set to  0.000000
2/11/2012	2:42:00 PM	H2 MFC set to  0.000000
2/11/2012	2:42:00 PM	BCl3 MFC set to  0.000000
2/11/2012	2:42:00 PM	PH3 MFC set to  0.000000
2/11/2012	2:42:00 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:42:00 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	2:42:00 PM	Tube furnace set to 0
2/11/2012	2:42:03 PM	H2 valve closed
2/11/2012	2:42:03 PM	BCl3 valve closed
2/11/2012	2:42:03 PM	PH3 valve closed
2/11/2012	2:42:03 PM	SiCl4 pre valve closed
2/11/2012	2:42:03 PM	SiCl4 post valve closed
2/11/2012	2:42:03 PM	Main Vac valve closed
2/11/2012	2:42:03 PM	Bypass valve closed
2/11/2012	2:42:03 PM	Bubbler valve closed
2/11/2012	2:42:03 PM	Helium valve opened
2/11/2012	2:42:03 PM	Helium MFC set to  500.000000
2/11/2012	2:42:03 PM	H2 MFC set to  0.000000
2/11/2012	2:42:03 PM	BCl3 MFC set to  0.000000
2/11/2012	2:42:03 PM	PH3 MFC set to  0.000000
2/11/2012	2:42:03 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:42:03 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	2:42:03 PM	Tube furnace set to 0
2/11/2012	2:43:05 PM	Helium valve closed
2/11/2012	2:43:05 PM	H2 valve closed
2/11/2012	2:43:05 PM	BCl3 valve closed
2/11/2012	2:43:05 PM	PH3 valve closed
2/11/2012	2:43:05 PM	SiCl4 pre valve closed
2/11/2012	2:43:05 PM	SiCl4 post valve closed
2/11/2012	2:43:05 PM	Main Vac valve closed
2/11/2012	2:43:05 PM	Bypass valve closed
2/11/2012	2:43:05 PM	Bubbler valve closed
2/11/2012	2:43:05 PM	Helium MFC set to  0.000000
2/11/2012	2:43:05 PM	H2 MFC set to  0.000000
2/11/2012	2:43:05 PM	BCl3 MFC set to  0.000000
2/11/2012	2:43:05 PM	PH3 MFC set to  0.000000
2/11/2012	2:43:05 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:43:05 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	2:43:05 PM	Tube furnace set to 0
2/11/2012	2:43:06 PM	Run finished at 2:43 PM
2/11/2012	2:43:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2012	2:56:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2012	2:56:06 PM	Recipe started at 2:56 PM
2/11/2012	2:56:06 PM	Helium valve closed
2/11/2012	2:56:06 PM	H2 valve closed
2/11/2012	2:56:06 PM	BCl3 valve closed
2/11/2012	2:56:06 PM	PH3 valve closed
2/11/2012	2:56:06 PM	SiCl4 pre valve closed
2/11/2012	2:56:06 PM	SiCl4 post valve closed
2/11/2012	2:56:06 PM	Main Vac valve closed
2/11/2012	2:56:06 PM	Bubbler valve closed
2/11/2012	2:56:06 PM	Bypass valve opened
2/11/2012	2:56:06 PM	Helium MFC set to  0.000000
2/11/2012	2:56:06 PM	H2 MFC set to  0.000000
2/11/2012	2:56:06 PM	BCl3 MFC set to  0.000000
2/11/2012	2:56:06 PM	PH3 MFC set to  0.000000
2/11/2012	2:56:06 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:56:06 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	2:56:06 PM	Tube furnace set to 0
2/11/2012	2:57:11 PM	Helium valve closed
2/11/2012	2:57:11 PM	H2 valve closed
2/11/2012	2:57:11 PM	BCl3 valve closed
2/11/2012	2:57:11 PM	PH3 valve closed
2/11/2012	2:57:11 PM	SiCl4 pre valve closed
2/11/2012	2:57:11 PM	SiCl4 post valve closed
2/11/2012	2:57:11 PM	Main Vac valve closed
2/11/2012	2:57:11 PM	Bubbler valve closed
2/11/2012	2:57:11 PM	Bypass valve opened
2/11/2012	2:57:11 PM	Helium MFC set to  0.000000
2/11/2012	2:57:11 PM	H2 MFC set to  0.000000
2/11/2012	2:57:11 PM	BCl3 MFC set to  0.000000
2/11/2012	2:57:11 PM	PH3 MFC set to  0.000000
2/11/2012	2:57:11 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:57:11 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	2:57:11 PM	Tube furnace set to 0
2/11/2012	2:58:11 PM	Helium valve closed
2/11/2012	2:58:11 PM	H2 valve closed
2/11/2012	2:58:11 PM	BCl3 valve closed
2/11/2012	2:58:11 PM	PH3 valve closed
2/11/2012	2:58:12 PM	SiCl4 pre valve closed
2/11/2012	2:58:12 PM	SiCl4 post valve closed
2/11/2012	2:58:12 PM	Bypass valve closed
2/11/2012	2:58:12 PM	Bubbler valve closed
2/11/2012	2:58:12 PM	Main Vac valve opened
2/11/2012	2:58:12 PM	Helium MFC set to  0.000000
2/11/2012	2:58:12 PM	H2 MFC set to  0.000000
2/11/2012	2:58:12 PM	BCl3 MFC set to  0.000000
2/11/2012	2:58:12 PM	PH3 MFC set to  0.000000
2/11/2012	2:58:12 PM	SiCl4 MFC set to  0.000000
2/11/2012	2:58:12 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	2:58:12 PM	Tube furnace set to 0
2/11/2012	2:58:13 PM	Run finished at 2:58 PM
2/11/2012	2:58:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2012	4:15:53 PM	Main Vac valve closed
2/11/2012	4:16:15 PM	Main Vac valve opened
2/11/2012	4:18:23 PM	Recipe started at 4:18 PM
2/11/2012	4:18:23 PM	Helium valve closed
2/11/2012	4:18:23 PM	H2 valve closed
2/11/2012	4:18:23 PM	BCl3 valve closed
2/11/2012	4:18:23 PM	PH3 valve closed
2/11/2012	4:18:23 PM	SiCl4 pre valve closed
2/11/2012	4:18:23 PM	SiCl4 post valve closed
2/11/2012	4:18:23 PM	Main Vac valve closed
2/11/2012	4:18:23 PM	Bypass valve closed
2/11/2012	4:18:23 PM	Bubbler valve closed
2/11/2012	4:18:23 PM	Helium MFC set to  0.000000
2/11/2012	4:18:23 PM	H2 MFC set to  0.000000
2/11/2012	4:18:23 PM	BCl3 MFC set to  0.000000
2/11/2012	4:18:23 PM	PH3 MFC set to  0.000000
2/11/2012	4:18:23 PM	SiCl4 MFC set to  0.000000
2/11/2012	4:18:23 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	4:18:23 PM	Tube furnace set to 0
2/11/2012	4:18:26 PM	Helium valve closed
2/11/2012	4:18:26 PM	BCl3 valve closed
2/11/2012	4:18:26 PM	PH3 valve closed
2/11/2012	4:18:26 PM	SiCl4 pre valve closed
2/11/2012	4:18:26 PM	SiCl4 post valve closed
2/11/2012	4:18:26 PM	Main Vac valve closed
2/11/2012	4:18:26 PM	Bypass valve closed
2/11/2012	4:18:26 PM	Bubbler valve closed
2/11/2012	4:18:26 PM	H2 valve opened
2/11/2012	4:18:26 PM	Helium MFC set to  0.000000
2/11/2012	4:18:26 PM	H2 MFC set to  500.000000
2/11/2012	4:18:26 PM	BCl3 MFC set to  0.000000
2/11/2012	4:18:26 PM	PH3 MFC set to  0.000000
2/11/2012	4:18:26 PM	SiCl4 MFC set to  0.000000
2/11/2012	4:18:26 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	4:18:26 PM	Tube furnace set to 0
2/11/2012	4:19:32 PM	Helium valve closed
2/11/2012	4:19:32 PM	BCl3 valve closed
2/11/2012	4:19:32 PM	PH3 valve closed
2/11/2012	4:19:32 PM	SiCl4 pre valve closed
2/11/2012	4:19:32 PM	SiCl4 post valve closed
2/11/2012	4:19:32 PM	Main Vac valve closed
2/11/2012	4:19:32 PM	Bypass valve closed
2/11/2012	4:19:32 PM	H2 valve opened
2/11/2012	4:19:32 PM	Bubbler valve opened
2/11/2012	4:19:32 PM	Helium MFC set to  0.000000
2/11/2012	4:19:32 PM	H2 MFC set to  500.000000
2/11/2012	4:19:32 PM	BCl3 MFC set to  0.000000
2/11/2012	4:19:32 PM	PH3 MFC set to  0.000000
2/11/2012	4:19:32 PM	SiCl4 MFC set to  0.000000
2/11/2012	4:19:32 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	4:19:32 PM	Tube furnace set to 0
2/11/2012	4:19:33 PM	Helium valve closed
2/11/2012	4:19:33 PM	BCl3 valve closed
2/11/2012	4:19:33 PM	PH3 valve closed
2/11/2012	4:19:33 PM	SiCl4 pre valve closed
2/11/2012	4:19:33 PM	SiCl4 post valve closed
2/11/2012	4:19:33 PM	Main Vac valve closed
2/11/2012	4:19:33 PM	Bypass valve closed
2/11/2012	4:19:33 PM	H2 valve opened
2/11/2012	4:19:33 PM	Bubbler valve opened
2/11/2012	4:19:33 PM	Helium MFC set to  0.000000
2/11/2012	4:19:33 PM	H2 MFC set to  500.000000
2/11/2012	4:19:33 PM	BCl3 MFC set to  0.000000
2/11/2012	4:19:33 PM	PH3 MFC set to  0.000000
2/11/2012	4:19:33 PM	SiCl4 MFC set to  0.000000
2/11/2012	4:19:33 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	4:19:34 PM	Tube furnace set to 1000
2/11/2012	4:44:34 PM	Helium valve closed
2/11/2012	4:44:34 PM	PH3 valve closed
2/11/2012	4:44:34 PM	Main Vac valve closed
2/11/2012	4:44:34 PM	Bypass valve closed
2/11/2012	4:44:34 PM	H2 valve opened
2/11/2012	4:44:34 PM	BCl3 valve opened
2/11/2012	4:44:34 PM	SiCl4 pre valve opened
2/11/2012	4:44:34 PM	SiCl4 post valve opened
2/11/2012	4:44:34 PM	Bubbler valve opened
2/11/2012	4:44:34 PM	Helium MFC set to  0.000000
2/11/2012	4:44:34 PM	H2 MFC set to  450.000000
2/11/2012	4:44:34 PM	BCl3 MFC set to  1.500000
2/11/2012	4:44:34 PM	PH3 MFC set to  0.000000
2/11/2012	4:44:34 PM	SiCl4 MFC set to  50.000000
2/11/2012	4:44:34 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	4:44:34 PM	Tube furnace set to 1000
2/11/2012	5:09:34 PM	Helium valve closed
2/11/2012	5:09:34 PM	BCl3 valve closed
2/11/2012	5:09:34 PM	PH3 valve closed
2/11/2012	5:09:34 PM	SiCl4 pre valve closed
2/11/2012	5:09:34 PM	SiCl4 post valve closed
2/11/2012	5:09:34 PM	Main Vac valve closed
2/11/2012	5:09:34 PM	Bypass valve closed
2/11/2012	5:09:34 PM	H2 valve opened
2/11/2012	5:09:34 PM	Bubbler valve opened
2/11/2012	5:09:34 PM	Helium MFC set to  0.000000
2/11/2012	5:09:34 PM	H2 MFC set to  500.000000
2/11/2012	5:09:34 PM	BCl3 MFC set to  0.000000
2/11/2012	5:09:34 PM	PH3 MFC set to  0.000000
2/11/2012	5:09:34 PM	SiCl4 MFC set to  0.000000
2/11/2012	5:09:34 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	5:09:34 PM	Tube furnace set to 750
2/11/2012	5:24:34 PM	H2 valve closed
2/11/2012	5:24:34 PM	BCl3 valve closed
2/11/2012	5:24:34 PM	PH3 valve closed
2/11/2012	5:24:34 PM	SiCl4 pre valve closed
2/11/2012	5:24:34 PM	SiCl4 post valve closed
2/11/2012	5:24:34 PM	Main Vac valve closed
2/11/2012	5:24:34 PM	Bypass valve closed
2/11/2012	5:24:34 PM	Helium valve opened
2/11/2012	5:24:34 PM	Bubbler valve opened
2/11/2012	5:24:34 PM	Helium MFC set to  500.000000
2/11/2012	5:24:34 PM	H2 MFC set to  0.000000
2/11/2012	5:24:34 PM	BCl3 MFC set to  0.000000
2/11/2012	5:24:34 PM	PH3 MFC set to  0.000000
2/11/2012	5:24:34 PM	SiCl4 MFC set to  0.000000
2/11/2012	5:24:34 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	5:24:34 PM	Tube furnace set to 0
2/11/2012	5:44:34 PM	Helium valve closed
2/11/2012	5:44:34 PM	H2 valve closed
2/11/2012	5:44:34 PM	BCl3 valve closed
2/11/2012	5:44:34 PM	PH3 valve closed
2/11/2012	5:44:34 PM	SiCl4 pre valve closed
2/11/2012	5:44:34 PM	SiCl4 post valve closed
2/11/2012	5:44:34 PM	Main Vac valve closed
2/11/2012	5:44:34 PM	Bypass valve closed
2/11/2012	5:44:34 PM	Bubbler valve closed
2/11/2012	5:44:34 PM	Helium MFC set to  0.000000
2/11/2012	5:44:34 PM	H2 MFC set to  0.000000
2/11/2012	5:44:34 PM	BCl3 MFC set to  0.000000
2/11/2012	5:44:34 PM	PH3 MFC set to  0.000000
2/11/2012	5:44:34 PM	SiCl4 MFC set to  0.000000
2/11/2012	5:44:34 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	5:44:34 PM	Tube furnace set to 0
2/11/2012	6:04:35 PM	Helium valve closed
2/11/2012	6:04:35 PM	H2 valve closed
2/11/2012	6:04:35 PM	BCl3 valve closed
2/11/2012	6:04:35 PM	PH3 valve closed
2/11/2012	6:04:35 PM	SiCl4 pre valve closed
2/11/2012	6:04:35 PM	SiCl4 post valve closed
2/11/2012	6:04:35 PM	Main Vac valve closed
2/11/2012	6:04:35 PM	Bubbler valve closed
2/11/2012	6:04:35 PM	Bypass valve opened
2/11/2012	6:04:35 PM	Helium MFC set to  0.000000
2/11/2012	6:04:35 PM	H2 MFC set to  0.000000
2/11/2012	6:04:35 PM	BCl3 MFC set to  0.000000
2/11/2012	6:04:35 PM	PH3 MFC set to  0.000000
2/11/2012	6:04:35 PM	SiCl4 MFC set to  0.000000
2/11/2012	6:04:35 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	6:04:35 PM	Tube furnace set to 0
2/11/2012	6:05:25 PM	Helium valve closed
2/11/2012	6:05:25 PM	H2 valve closed
2/11/2012	6:05:25 PM	BCl3 valve closed
2/11/2012	6:05:25 PM	PH3 valve closed
2/11/2012	6:05:25 PM	SiCl4 pre valve closed
2/11/2012	6:05:25 PM	SiCl4 post valve closed
2/11/2012	6:05:25 PM	Main Vac valve closed
2/11/2012	6:05:25 PM	Bubbler valve closed
2/11/2012	6:05:25 PM	Bypass valve opened
2/11/2012	6:05:25 PM	Helium MFC set to  0.000000
2/11/2012	6:05:25 PM	H2 MFC set to  0.000000
2/11/2012	6:05:25 PM	BCl3 MFC set to  0.000000
2/11/2012	6:05:25 PM	PH3 MFC set to  0.000000
2/11/2012	6:05:25 PM	SiCl4 MFC set to  0.000000
2/11/2012	6:05:26 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	6:05:26 PM	Tube furnace set to 0
2/11/2012	6:06:26 PM	Helium valve closed
2/11/2012	6:06:26 PM	H2 valve closed
2/11/2012	6:06:26 PM	BCl3 valve closed
2/11/2012	6:06:26 PM	PH3 valve closed
2/11/2012	6:06:26 PM	SiCl4 pre valve closed
2/11/2012	6:06:26 PM	SiCl4 post valve closed
2/11/2012	6:06:26 PM	Bypass valve closed
2/11/2012	6:06:26 PM	Bubbler valve closed
2/11/2012	6:06:26 PM	Main Vac valve opened
2/11/2012	6:06:26 PM	Helium MFC set to  0.000000
2/11/2012	6:06:26 PM	H2 MFC set to  0.000000
2/11/2012	6:06:26 PM	BCl3 MFC set to  0.000000
2/11/2012	6:06:26 PM	PH3 MFC set to  0.000000
2/11/2012	6:06:26 PM	SiCl4 MFC set to  0.000000
2/11/2012	6:06:26 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	6:06:26 PM	Tube furnace set to 0
2/11/2012	6:10:26 PM	Run aborted at 6:10 PM
2/11/2012	6:10:26 PM	Helium valve closed
2/11/2012	6:10:26 PM	H2 valve closed
2/11/2012	6:10:26 PM	BCl3 valve closed
2/11/2012	6:10:26 PM	PH3 valve closed
2/11/2012	6:10:26 PM	SiCl4 pre valve closed
2/11/2012	6:10:26 PM	SiCl4 post valve closed
2/11/2012	6:10:26 PM	Bypass valve closed
2/11/2012	6:10:26 PM	Main Vac valve closed
2/11/2012	6:10:26 PM	Bubbler valve closed
2/11/2012	6:10:26 PM	Helium MFC set to  0.000000
2/11/2012	6:10:26 PM	H2 MFC set to  0.000000
2/11/2012	6:10:26 PM	BCl3 MFC set to  0.000000
2/11/2012	6:10:26 PM	PH3 MFC set to  0.000000
2/11/2012	6:10:26 PM	SiCl4 MFC set to  0.000000
2/11/2012	6:10:26 PM	Tube furnace set to 0
2/11/2012	6:10:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2012	6:10:29 PM	Recipe started at 6:10 PM
2/11/2012	6:10:29 PM	Helium valve closed
2/11/2012	6:10:29 PM	H2 valve closed
2/11/2012	6:10:29 PM	BCl3 valve closed
2/11/2012	6:10:29 PM	PH3 valve closed
2/11/2012	6:10:29 PM	SiCl4 pre valve closed
2/11/2012	6:10:29 PM	SiCl4 post valve closed
2/11/2012	6:10:29 PM	Main Vac valve closed
2/11/2012	6:10:29 PM	Bypass valve closed
2/11/2012	6:10:29 PM	Bubbler valve closed
2/11/2012	6:10:29 PM	Helium MFC set to  0.000000
2/11/2012	6:10:29 PM	H2 MFC set to  0.000000
2/11/2012	6:10:29 PM	BCl3 MFC set to  0.000000
2/11/2012	6:10:29 PM	PH3 MFC set to  0.000000
2/11/2012	6:10:29 PM	SiCl4 MFC set to  0.000000
2/11/2012	6:10:29 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	6:10:30 PM	Tube furnace set to 0
2/11/2012	6:10:33 PM	H2 valve closed
2/11/2012	6:10:33 PM	BCl3 valve closed
2/11/2012	6:10:33 PM	PH3 valve closed
2/11/2012	6:10:33 PM	SiCl4 pre valve closed
2/11/2012	6:10:33 PM	SiCl4 post valve closed
2/11/2012	6:10:33 PM	Main Vac valve closed
2/11/2012	6:10:33 PM	Bypass valve closed
2/11/2012	6:10:33 PM	Bubbler valve closed
2/11/2012	6:10:33 PM	Helium valve opened
2/11/2012	6:10:33 PM	Helium MFC set to  500.000000
2/11/2012	6:10:33 PM	H2 MFC set to  0.000000
2/11/2012	6:10:33 PM	BCl3 MFC set to  0.000000
2/11/2012	6:10:33 PM	PH3 MFC set to  0.000000
2/11/2012	6:10:33 PM	SiCl4 MFC set to  0.000000
2/11/2012	6:10:33 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	6:10:33 PM	Tube furnace set to 0
2/11/2012	6:11:36 PM	Helium valve closed
2/11/2012	6:11:36 PM	H2 valve closed
2/11/2012	6:11:36 PM	BCl3 valve closed
2/11/2012	6:11:36 PM	PH3 valve closed
2/11/2012	6:11:36 PM	SiCl4 pre valve closed
2/11/2012	6:11:36 PM	SiCl4 post valve closed
2/11/2012	6:11:36 PM	Main Vac valve closed
2/11/2012	6:11:36 PM	Bypass valve closed
2/11/2012	6:11:36 PM	Bubbler valve closed
2/11/2012	6:11:36 PM	Helium MFC set to  0.000000
2/11/2012	6:11:36 PM	H2 MFC set to  0.000000
2/11/2012	6:11:36 PM	BCl3 MFC set to  0.000000
2/11/2012	6:11:36 PM	PH3 MFC set to  0.000000
2/11/2012	6:11:36 PM	SiCl4 MFC set to  0.000000
2/11/2012	6:11:36 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	6:11:36 PM	Tube furnace set to 0
2/11/2012	6:11:37 PM	Run finished at 6:11 PM
2/11/2012	6:11:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2012	6:15:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2012	6:15:35 PM	Recipe started at 6:15 PM
2/11/2012	6:15:35 PM	Helium valve closed
2/11/2012	6:15:35 PM	H2 valve closed
2/11/2012	6:15:35 PM	BCl3 valve closed
2/11/2012	6:15:35 PM	PH3 valve closed
2/11/2012	6:15:35 PM	SiCl4 pre valve closed
2/11/2012	6:15:35 PM	SiCl4 post valve closed
2/11/2012	6:15:35 PM	Main Vac valve closed
2/11/2012	6:15:35 PM	Bubbler valve closed
2/11/2012	6:15:35 PM	Bypass valve opened
2/11/2012	6:15:35 PM	Helium MFC set to  0.000000
2/11/2012	6:15:35 PM	H2 MFC set to  0.000000
2/11/2012	6:15:35 PM	BCl3 MFC set to  0.000000
2/11/2012	6:15:35 PM	PH3 MFC set to  0.000000
2/11/2012	6:15:35 PM	SiCl4 MFC set to  0.000000
2/11/2012	6:15:35 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	6:15:35 PM	Tube furnace set to 0
2/11/2012	6:16:37 PM	Helium valve closed
2/11/2012	6:16:37 PM	H2 valve closed
2/11/2012	6:16:37 PM	BCl3 valve closed
2/11/2012	6:16:37 PM	PH3 valve closed
2/11/2012	6:16:37 PM	SiCl4 pre valve closed
2/11/2012	6:16:37 PM	SiCl4 post valve closed
2/11/2012	6:16:37 PM	Main Vac valve closed
2/11/2012	6:16:37 PM	Bubbler valve closed
2/11/2012	6:16:37 PM	Bypass valve opened
2/11/2012	6:16:37 PM	Helium MFC set to  0.000000
2/11/2012	6:16:37 PM	H2 MFC set to  0.000000
2/11/2012	6:16:37 PM	BCl3 MFC set to  0.000000
2/11/2012	6:16:37 PM	PH3 MFC set to  0.000000
2/11/2012	6:16:37 PM	SiCl4 MFC set to  0.000000
2/11/2012	6:16:37 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	6:16:37 PM	Tube furnace set to 0
2/11/2012	6:17:37 PM	Helium valve closed
2/11/2012	6:17:37 PM	H2 valve closed
2/11/2012	6:17:37 PM	BCl3 valve closed
2/11/2012	6:17:37 PM	PH3 valve closed
2/11/2012	6:17:37 PM	SiCl4 pre valve closed
2/11/2012	6:17:37 PM	SiCl4 post valve closed
2/11/2012	6:17:37 PM	Bypass valve closed
2/11/2012	6:17:37 PM	Bubbler valve closed
2/11/2012	6:17:37 PM	Main Vac valve opened
2/11/2012	6:17:37 PM	Helium MFC set to  0.000000
2/11/2012	6:17:37 PM	H2 MFC set to  0.000000
2/11/2012	6:17:37 PM	BCl3 MFC set to  0.000000
2/11/2012	6:17:37 PM	PH3 MFC set to  0.000000
2/11/2012	6:17:37 PM	SiCl4 MFC set to  0.000000
2/11/2012	6:17:37 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	6:17:38 PM	Tube furnace set to 0
2/11/2012	6:17:39 PM	Run finished at 6:17 PM
2/11/2012	6:17:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2012	8:22:07 PM	Main Vac valve closed
2/11/2012	8:22:29 PM	Main Vac valve opened
2/11/2012	8:22:50 PM	Recipe started at 8:22 PM
2/11/2012	8:22:50 PM	Helium valve closed
2/11/2012	8:22:50 PM	H2 valve closed
2/11/2012	8:22:50 PM	BCl3 valve closed
2/11/2012	8:22:50 PM	PH3 valve closed
2/11/2012	8:22:50 PM	SiCl4 pre valve closed
2/11/2012	8:22:50 PM	SiCl4 post valve closed
2/11/2012	8:22:50 PM	Main Vac valve closed
2/11/2012	8:22:50 PM	Bypass valve closed
2/11/2012	8:22:50 PM	Bubbler valve closed
2/11/2012	8:22:50 PM	Helium MFC set to  0.000000
2/11/2012	8:22:50 PM	H2 MFC set to  0.000000
2/11/2012	8:22:50 PM	BCl3 MFC set to  0.000000
2/11/2012	8:22:50 PM	PH3 MFC set to  0.000000
2/11/2012	8:22:50 PM	SiCl4 MFC set to  0.000000
2/11/2012	8:22:50 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	8:22:51 PM	Tube furnace set to 0
2/11/2012	8:22:54 PM	Helium valve closed
2/11/2012	8:22:54 PM	BCl3 valve closed
2/11/2012	8:22:54 PM	PH3 valve closed
2/11/2012	8:22:54 PM	SiCl4 pre valve closed
2/11/2012	8:22:54 PM	SiCl4 post valve closed
2/11/2012	8:22:54 PM	Main Vac valve closed
2/11/2012	8:22:54 PM	Bypass valve closed
2/11/2012	8:22:54 PM	Bubbler valve closed
2/11/2012	8:22:54 PM	H2 valve opened
2/11/2012	8:22:54 PM	Helium MFC set to  0.000000
2/11/2012	8:22:54 PM	H2 MFC set to  500.000000
2/11/2012	8:22:54 PM	BCl3 MFC set to  0.000000
2/11/2012	8:22:54 PM	PH3 MFC set to  0.000000
2/11/2012	8:22:54 PM	SiCl4 MFC set to  0.000000
2/11/2012	8:22:54 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	8:22:54 PM	Tube furnace set to 0
2/11/2012	8:24:00 PM	Helium valve closed
2/11/2012	8:24:00 PM	BCl3 valve closed
2/11/2012	8:24:00 PM	PH3 valve closed
2/11/2012	8:24:00 PM	SiCl4 pre valve closed
2/11/2012	8:24:00 PM	SiCl4 post valve closed
2/11/2012	8:24:00 PM	Main Vac valve closed
2/11/2012	8:24:00 PM	Bypass valve closed
2/11/2012	8:24:00 PM	H2 valve opened
2/11/2012	8:24:00 PM	Bubbler valve opened
2/11/2012	8:24:00 PM	Helium MFC set to  0.000000
2/11/2012	8:24:00 PM	H2 MFC set to  500.000000
2/11/2012	8:24:00 PM	BCl3 MFC set to  0.000000
2/11/2012	8:24:00 PM	PH3 MFC set to  0.000000
2/11/2012	8:24:01 PM	SiCl4 MFC set to  0.000000
2/11/2012	8:24:01 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	8:24:01 PM	Tube furnace set to 0
2/11/2012	8:24:02 PM	Helium valve closed
2/11/2012	8:24:02 PM	BCl3 valve closed
2/11/2012	8:24:02 PM	PH3 valve closed
2/11/2012	8:24:02 PM	SiCl4 pre valve closed
2/11/2012	8:24:02 PM	SiCl4 post valve closed
2/11/2012	8:24:02 PM	Main Vac valve closed
2/11/2012	8:24:02 PM	Bypass valve closed
2/11/2012	8:24:02 PM	H2 valve opened
2/11/2012	8:24:02 PM	Bubbler valve opened
2/11/2012	8:24:02 PM	Helium MFC set to  0.000000
2/11/2012	8:24:02 PM	H2 MFC set to  500.000000
2/11/2012	8:24:02 PM	BCl3 MFC set to  0.000000
2/11/2012	8:24:02 PM	PH3 MFC set to  0.000000
2/11/2012	8:24:02 PM	SiCl4 MFC set to  0.000000
2/11/2012	8:24:02 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	8:24:02 PM	Tube furnace set to 1000
2/11/2012	8:49:02 PM	Helium valve closed
2/11/2012	8:49:02 PM	PH3 valve closed
2/11/2012	8:49:02 PM	Main Vac valve closed
2/11/2012	8:49:02 PM	Bypass valve closed
2/11/2012	8:49:02 PM	H2 valve opened
2/11/2012	8:49:02 PM	BCl3 valve opened
2/11/2012	8:49:02 PM	SiCl4 pre valve opened
2/11/2012	8:49:02 PM	SiCl4 post valve opened
2/11/2012	8:49:02 PM	Bubbler valve opened
2/11/2012	8:49:02 PM	Helium MFC set to  0.000000
2/11/2012	8:49:02 PM	H2 MFC set to  450.000000
2/11/2012	8:49:02 PM	BCl3 MFC set to  1.500000
2/11/2012	8:49:02 PM	PH3 MFC set to  0.000000
2/11/2012	8:49:02 PM	SiCl4 MFC set to  50.000000
2/11/2012	8:49:02 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	8:49:02 PM	Tube furnace set to 1000
2/11/2012	9:14:02 PM	Helium valve closed
2/11/2012	9:14:02 PM	BCl3 valve closed
2/11/2012	9:14:02 PM	PH3 valve closed
2/11/2012	9:14:02 PM	SiCl4 pre valve closed
2/11/2012	9:14:02 PM	SiCl4 post valve closed
2/11/2012	9:14:02 PM	Main Vac valve closed
2/11/2012	9:14:02 PM	Bypass valve closed
2/11/2012	9:14:02 PM	H2 valve opened
2/11/2012	9:14:02 PM	Bubbler valve opened
2/11/2012	9:14:02 PM	Helium MFC set to  0.000000
2/11/2012	9:14:02 PM	H2 MFC set to  500.000000
2/11/2012	9:14:02 PM	BCl3 MFC set to  0.000000
2/11/2012	9:14:02 PM	PH3 MFC set to  0.000000
2/11/2012	9:14:02 PM	SiCl4 MFC set to  0.000000
2/11/2012	9:14:02 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	9:14:02 PM	Tube furnace set to 750
2/11/2012	9:29:02 PM	H2 valve closed
2/11/2012	9:29:02 PM	BCl3 valve closed
2/11/2012	9:29:02 PM	PH3 valve closed
2/11/2012	9:29:02 PM	SiCl4 pre valve closed
2/11/2012	9:29:02 PM	SiCl4 post valve closed
2/11/2012	9:29:02 PM	Main Vac valve closed
2/11/2012	9:29:02 PM	Bypass valve closed
2/11/2012	9:29:02 PM	Helium valve opened
2/11/2012	9:29:02 PM	Bubbler valve opened
2/11/2012	9:29:02 PM	Helium MFC set to  500.000000
2/11/2012	9:29:02 PM	H2 MFC set to  0.000000
2/11/2012	9:29:02 PM	BCl3 MFC set to  0.000000
2/11/2012	9:29:02 PM	PH3 MFC set to  0.000000
2/11/2012	9:29:02 PM	SiCl4 MFC set to  0.000000
2/11/2012	9:29:02 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	9:29:02 PM	Tube furnace set to 0
2/11/2012	9:49:02 PM	Helium valve closed
2/11/2012	9:49:02 PM	H2 valve closed
2/11/2012	9:49:02 PM	BCl3 valve closed
2/11/2012	9:49:02 PM	PH3 valve closed
2/11/2012	9:49:02 PM	SiCl4 pre valve closed
2/11/2012	9:49:02 PM	SiCl4 post valve closed
2/11/2012	9:49:02 PM	Main Vac valve closed
2/11/2012	9:49:02 PM	Bypass valve closed
2/11/2012	9:49:02 PM	Bubbler valve closed
2/11/2012	9:49:02 PM	Helium MFC set to  0.000000
2/11/2012	9:49:02 PM	H2 MFC set to  0.000000
2/11/2012	9:49:02 PM	BCl3 MFC set to  0.000000
2/11/2012	9:49:02 PM	PH3 MFC set to  0.000000
2/11/2012	9:49:02 PM	SiCl4 MFC set to  0.000000
2/11/2012	9:49:02 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	9:49:03 PM	Tube furnace set to 0
2/11/2012	10:09:03 PM	Helium valve closed
2/11/2012	10:09:03 PM	H2 valve closed
2/11/2012	10:09:03 PM	BCl3 valve closed
2/11/2012	10:09:03 PM	PH3 valve closed
2/11/2012	10:09:03 PM	SiCl4 pre valve closed
2/11/2012	10:09:03 PM	SiCl4 post valve closed
2/11/2012	10:09:03 PM	Main Vac valve closed
2/11/2012	10:09:03 PM	Bubbler valve closed
2/11/2012	10:09:03 PM	Bypass valve opened
2/11/2012	10:09:03 PM	Helium MFC set to  0.000000
2/11/2012	10:09:03 PM	H2 MFC set to  0.000000
2/11/2012	10:09:03 PM	BCl3 MFC set to  0.000000
2/11/2012	10:09:03 PM	PH3 MFC set to  0.000000
2/11/2012	10:09:03 PM	SiCl4 MFC set to  0.000000
2/11/2012	10:09:03 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	10:09:03 PM	Tube furnace set to 0
2/11/2012	10:09:49 PM	Helium valve closed
2/11/2012	10:09:49 PM	H2 valve closed
2/11/2012	10:09:49 PM	BCl3 valve closed
2/11/2012	10:09:49 PM	PH3 valve closed
2/11/2012	10:09:49 PM	SiCl4 pre valve closed
2/11/2012	10:09:49 PM	SiCl4 post valve closed
2/11/2012	10:09:49 PM	Main Vac valve closed
2/11/2012	10:09:49 PM	Bubbler valve closed
2/11/2012	10:09:49 PM	Bypass valve opened
2/11/2012	10:09:49 PM	Helium MFC set to  0.000000
2/11/2012	10:09:49 PM	H2 MFC set to  0.000000
2/11/2012	10:09:49 PM	BCl3 MFC set to  0.000000
2/11/2012	10:09:49 PM	PH3 MFC set to  0.000000
2/11/2012	10:09:49 PM	SiCl4 MFC set to  0.000000
2/11/2012	10:09:49 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	10:09:49 PM	Tube furnace set to 0
2/11/2012	10:10:49 PM	Helium valve closed
2/11/2012	10:10:49 PM	H2 valve closed
2/11/2012	10:10:49 PM	BCl3 valve closed
2/11/2012	10:10:50 PM	PH3 valve closed
2/11/2012	10:10:50 PM	SiCl4 pre valve closed
2/11/2012	10:10:50 PM	SiCl4 post valve closed
2/11/2012	10:10:50 PM	Bypass valve closed
2/11/2012	10:10:50 PM	Bubbler valve closed
2/11/2012	10:10:50 PM	Main Vac valve opened
2/11/2012	10:10:50 PM	Helium MFC set to  0.000000
2/11/2012	10:10:50 PM	H2 MFC set to  0.000000
2/11/2012	10:10:50 PM	BCl3 MFC set to  0.000000
2/11/2012	10:10:50 PM	PH3 MFC set to  0.000000
2/11/2012	10:10:50 PM	SiCl4 MFC set to  0.000000
2/11/2012	10:10:50 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	10:10:50 PM	Tube furnace set to 0
2/11/2012	11:10:50 PM	Run finished at 11:10 PM
2/11/2012	11:18:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2012	11:18:09 PM	Recipe started at 11:18 PM
2/11/2012	11:18:09 PM	Helium valve closed
2/11/2012	11:18:09 PM	H2 valve closed
2/11/2012	11:18:09 PM	BCl3 valve closed
2/11/2012	11:18:09 PM	PH3 valve closed
2/11/2012	11:18:09 PM	SiCl4 pre valve closed
2/11/2012	11:18:09 PM	SiCl4 post valve closed
2/11/2012	11:18:09 PM	Main Vac valve closed
2/11/2012	11:18:09 PM	Bypass valve closed
2/11/2012	11:18:09 PM	Bubbler valve closed
2/11/2012	11:18:09 PM	Helium MFC set to  0.000000
2/11/2012	11:18:09 PM	H2 MFC set to  0.000000
2/11/2012	11:18:09 PM	BCl3 MFC set to  0.000000
2/11/2012	11:18:09 PM	PH3 MFC set to  0.000000
2/11/2012	11:18:09 PM	SiCl4 MFC set to  0.000000
2/11/2012	11:18:09 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	11:18:10 PM	Tube furnace set to 0
2/11/2012	11:18:13 PM	H2 valve closed
2/11/2012	11:18:13 PM	BCl3 valve closed
2/11/2012	11:18:13 PM	PH3 valve closed
2/11/2012	11:18:13 PM	SiCl4 pre valve closed
2/11/2012	11:18:13 PM	SiCl4 post valve closed
2/11/2012	11:18:13 PM	Main Vac valve closed
2/11/2012	11:18:13 PM	Bypass valve closed
2/11/2012	11:18:13 PM	Bubbler valve closed
2/11/2012	11:18:13 PM	Helium valve opened
2/11/2012	11:18:13 PM	Helium MFC set to  500.000000
2/11/2012	11:18:13 PM	H2 MFC set to  0.000000
2/11/2012	11:18:13 PM	BCl3 MFC set to  0.000000
2/11/2012	11:18:13 PM	PH3 MFC set to  0.000000
2/11/2012	11:18:13 PM	SiCl4 MFC set to  0.000000
2/11/2012	11:18:13 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	11:18:13 PM	Tube furnace set to 0
2/11/2012	11:19:14 PM	Helium valve closed
2/11/2012	11:19:14 PM	H2 valve closed
2/11/2012	11:19:14 PM	BCl3 valve closed
2/11/2012	11:19:14 PM	PH3 valve closed
2/11/2012	11:19:14 PM	SiCl4 pre valve closed
2/11/2012	11:19:14 PM	SiCl4 post valve closed
2/11/2012	11:19:14 PM	Main Vac valve closed
2/11/2012	11:19:14 PM	Bypass valve closed
2/11/2012	11:19:14 PM	Bubbler valve closed
2/11/2012	11:19:14 PM	Helium MFC set to  0.000000
2/11/2012	11:19:14 PM	H2 MFC set to  0.000000
2/11/2012	11:19:14 PM	BCl3 MFC set to  0.000000
2/11/2012	11:19:14 PM	PH3 MFC set to  0.000000
2/11/2012	11:19:14 PM	SiCl4 MFC set to  0.000000
2/11/2012	11:19:14 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	11:19:14 PM	Tube furnace set to 0
2/11/2012	11:19:15 PM	Run finished at 11:19 PM
2/11/2012	11:19:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/11/2012	11:23:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2012	11:23:57 PM	Recipe started at 11:23 PM
2/11/2012	11:23:57 PM	Helium valve closed
2/11/2012	11:23:57 PM	H2 valve closed
2/11/2012	11:23:57 PM	BCl3 valve closed
2/11/2012	11:23:57 PM	PH3 valve closed
2/11/2012	11:23:57 PM	SiCl4 pre valve closed
2/11/2012	11:23:57 PM	SiCl4 post valve closed
2/11/2012	11:23:57 PM	Main Vac valve closed
2/11/2012	11:23:57 PM	Bubbler valve closed
2/11/2012	11:23:57 PM	Bypass valve opened
2/11/2012	11:23:57 PM	Helium MFC set to  0.000000
2/11/2012	11:23:57 PM	H2 MFC set to  0.000000
2/11/2012	11:23:57 PM	BCl3 MFC set to  0.000000
2/11/2012	11:23:57 PM	PH3 MFC set to  0.000000
2/11/2012	11:23:57 PM	SiCl4 MFC set to  0.000000
2/11/2012	11:23:57 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	11:23:58 PM	Tube furnace set to 0
2/11/2012	11:25:00 PM	Helium valve closed
2/11/2012	11:25:00 PM	H2 valve closed
2/11/2012	11:25:00 PM	BCl3 valve closed
2/11/2012	11:25:00 PM	PH3 valve closed
2/11/2012	11:25:00 PM	SiCl4 pre valve closed
2/11/2012	11:25:00 PM	SiCl4 post valve closed
2/11/2012	11:25:00 PM	Main Vac valve closed
2/11/2012	11:25:00 PM	Bubbler valve closed
2/11/2012	11:25:00 PM	Bypass valve opened
2/11/2012	11:25:00 PM	Helium MFC set to  0.000000
2/11/2012	11:25:00 PM	H2 MFC set to  0.000000
2/11/2012	11:25:00 PM	BCl3 MFC set to  0.000000
2/11/2012	11:25:00 PM	PH3 MFC set to  0.000000
2/11/2012	11:25:00 PM	SiCl4 MFC set to  0.000000
2/11/2012	11:25:00 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	11:25:01 PM	Tube furnace set to 0
2/11/2012	11:26:01 PM	Helium valve closed
2/11/2012	11:26:01 PM	H2 valve closed
2/11/2012	11:26:01 PM	BCl3 valve closed
2/11/2012	11:26:01 PM	PH3 valve closed
2/11/2012	11:26:01 PM	SiCl4 pre valve closed
2/11/2012	11:26:01 PM	SiCl4 post valve closed
2/11/2012	11:26:01 PM	Bypass valve closed
2/11/2012	11:26:01 PM	Bubbler valve closed
2/11/2012	11:26:01 PM	Main Vac valve opened
2/11/2012	11:26:01 PM	Helium MFC set to  0.000000
2/11/2012	11:26:01 PM	H2 MFC set to  0.000000
2/11/2012	11:26:01 PM	BCl3 MFC set to  0.000000
2/11/2012	11:26:01 PM	PH3 MFC set to  0.000000
2/11/2012	11:26:01 PM	SiCl4 MFC set to  0.000000
2/11/2012	11:26:01 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	11:26:01 PM	Tube furnace set to 0
2/11/2012	11:26:02 PM	Run finished at 11:26 PM
2/11/2012	11:26:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/11/2012	11:27:54 PM	Recipe started at 11:27 PM
2/11/2012	11:27:54 PM	Helium valve closed
2/11/2012	11:27:54 PM	H2 valve closed
2/11/2012	11:27:54 PM	BCl3 valve closed
2/11/2012	11:27:54 PM	PH3 valve closed
2/11/2012	11:27:54 PM	SiCl4 pre valve closed
2/11/2012	11:27:54 PM	SiCl4 post valve closed
2/11/2012	11:27:54 PM	Main Vac valve closed
2/11/2012	11:27:54 PM	Bypass valve closed
2/11/2012	11:27:54 PM	Bubbler valve closed
2/11/2012	11:27:54 PM	Helium MFC set to  0.000000
2/11/2012	11:27:54 PM	H2 MFC set to  0.000000
2/11/2012	11:27:54 PM	BCl3 MFC set to  0.000000
2/11/2012	11:27:54 PM	PH3 MFC set to  0.000000
2/11/2012	11:27:54 PM	SiCl4 MFC set to  0.000000
2/11/2012	11:27:54 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	11:27:54 PM	Tube furnace set to 0
2/11/2012	11:28:10 PM	Run aborted at 11:28 PM
2/11/2012	11:28:10 PM	Helium valve closed
2/11/2012	11:28:10 PM	H2 valve closed
2/11/2012	11:28:10 PM	BCl3 valve closed
2/11/2012	11:28:10 PM	PH3 valve closed
2/11/2012	11:28:10 PM	SiCl4 pre valve closed
2/11/2012	11:28:10 PM	SiCl4 post valve closed
2/11/2012	11:28:10 PM	Bypass valve closed
2/11/2012	11:28:10 PM	Main Vac valve closed
2/11/2012	11:28:10 PM	Bubbler valve closed
2/11/2012	11:28:10 PM	Helium MFC set to  0.000000
2/11/2012	11:28:10 PM	H2 MFC set to  0.000000
2/11/2012	11:28:10 PM	BCl3 MFC set to  0.000000
2/11/2012	11:28:10 PM	PH3 MFC set to  0.000000
2/11/2012	11:28:10 PM	SiCl4 MFC set to  0.000000
2/11/2012	11:28:10 PM	Tube furnace set to 0
2/11/2012	11:28:22 PM	Recipe started at 11:28 PM
2/11/2012	11:28:22 PM	Helium valve closed
2/11/2012	11:28:22 PM	H2 valve closed
2/11/2012	11:28:22 PM	BCl3 valve closed
2/11/2012	11:28:22 PM	PH3 valve closed
2/11/2012	11:28:22 PM	SiCl4 pre valve closed
2/11/2012	11:28:22 PM	SiCl4 post valve closed
2/11/2012	11:28:22 PM	Bypass valve closed
2/11/2012	11:28:22 PM	Bubbler valve closed
2/11/2012	11:28:22 PM	Main Vac valve opened
2/11/2012	11:28:22 PM	Helium MFC set to  0.000000
2/11/2012	11:28:22 PM	H2 MFC set to  0.000000
2/11/2012	11:28:22 PM	BCl3 MFC set to  0.000000
2/11/2012	11:28:22 PM	PH3 MFC set to  0.000000
2/11/2012	11:28:22 PM	SiCl4 MFC set to  0.000000
2/11/2012	11:28:22 PM	Bypass solenoid MFC set to  0.000000
2/11/2012	11:28:22 PM	Tube furnace set to 0
